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Industrial Metrology
Wafer Loaders for IC Inspection Microscopes NWL200 Series
Nikon's proprietary technology ensures reliable loading of ultra-thin 100µm wafers.
 
In the semiconductor manufacturing process, wafers are following a trend toward ever greater thinness. Nikon's oustanding proprietary technology makes the NWL200 Series the first lineup of wafer loaders for inspection microscopes capable of loading 100µm thin wafers. The NWL200 Series achieves highly reliable loading suitable for inspection of next-generation semiconductors.
 
 
Features
  • Nikon's original technology ensures safe, reliable loading of thin wafers

Support for ultra-thin 100µm wafers

Improved wafer-sensing functions

  • Transfer of Chemical Compound Semiconductor (Wafer) is possible

Addition of Alighment sensor for Chemical Compound wafer (optional)

  • Outstanding operability

Wafer-slot buttons offer improved operability

Elegant ergonomic design

High throughput

Anti-contamination measures for highly integrated production

High reliability

  • High-performance macro inspection and a range of illumination systems

Range of macro inspection functions are provided as standard

  • Convenient Web-linked functions

Remote access tool

  • System upgrades

Mix and match options for a range of applications