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Industrial Metrology
NEXIV VMZ-K Series
 
Confocal NEXIV
The Nikon Confocal NEXIV was developed on the strength of Nikon's leading opto-mechatronics (optical, mechanical and electronic) technologies. It incorporates a variety of confocal optics for fast and accurate evaluation of fine three-dimensional surface metrology, image processing technology, and TT L laser autofocus. It allows both 2D and height measurements in the same field of view.
 
The Confocal NEXIV is used for the inspection and measurement of critical dimensions of highly complex structures on advanced semiconductor devices, probe cards, substrate patterns on circuit boards, MEMS and a variety of other demanding applications.
 
Features
  • Confocal Objective Lenses: 1.5x - W.D. 24mm, 3x - W.D. 24mm, 7.5x - W.D. 24mm
  • Advanced image processing enhances contrast and fidelity with powerful edge detection to ensure accuracy and repeatability
  • Fast, confocal high precision height measurement 0.35 at 2 sigma in 1.5 second cycle time
  • New, easy-to-program, versatile VMR Automeasure software includes CAD reader, offline programming, profiling software and programming wizards
  • Faster image acquisition and system speed with selected defect-free instrument grade progressive scan black and white CCD camera
  • Ideal for measuring micro-dimensional 2D and 3D workpieces, all requiring exceptionally high accuracy. Examples include bump heights on advanced IC packages, MEMS, probe card, micro lens, contact lenses, photo spacers for color FPD panel, molds and others
  • Advanced Nikon optics provide superior images for improved repeatability and accuracy
  • 5-step 15x telecentric zoom (15:1) magnification to cover different fields of view and resolution requirements
  • Fast, accurate and durable - 300 X, 400Y mm travel with cast Mehanite stage with 150mm Z
  • Improved stage accuracy with new lower coefficient of expansion 0.1µm resolution scales
  • Precision ground large diameter ballscrew with DC servo motors for high speed and stiffness
  • Vision and TTL laser autofocus. High speed through-the-lens laser scans 1000 points/sec. with 0.5µm Z accuracy at 2 sigma