Product > Industrial Metrology
Industrial Metrology
World No.1 rotational accuracy is achieved in this class. The driving speed of each axis is improved to three times. The straightness accuracy of each axis is guaranteed. Flagship model of detector rotation type.
  • Rotation accuracy: 0.1μm
  • Column Straightness accuracy:1.3μm/700mm
  • Fully automatic 7-axis control
  • Industry’s first high-accuracy air bearings for the X, Y, Z,and θ axis.
  • Teaching Function and Automatic measuring of multiple workpieces
  • Measurement time is shortened by Maximum driving speed : 100mm/sec, and the efficiency improves.
  • Gabbro used in the column and base guarantees no secular change over time.